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- HEPA filters Ͽ û
- ۾ û µ, , GMP ؼ
- ۾ ȯ ⸦
- ä

- ܰ GMP (EP/USP ؿ )
- Two Pass RO, EDI, WFI generation ̿Ͽ (PW) ֻ (WFI)
- 24ð on-line monitoring ǽ
- óý (Bio-waste kill system)

- Oil-free ġ
- Clean steam, clean air, clean high pressure gas
- Micro filter system purified air gas





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